JPH01104035U - - Google Patents
Info
- Publication number
- JPH01104035U JPH01104035U JP19934987U JP19934987U JPH01104035U JP H01104035 U JPH01104035 U JP H01104035U JP 19934987 U JP19934987 U JP 19934987U JP 19934987 U JP19934987 U JP 19934987U JP H01104035 U JPH01104035 U JP H01104035U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- holder
- covers
- holder plate
- upper lid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000007772 electroless plating Methods 0.000 description 2
- 238000012856 packing Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19934987U JPH01104035U (en]) | 1987-12-28 | 1987-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19934987U JPH01104035U (en]) | 1987-12-28 | 1987-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01104035U true JPH01104035U (en]) | 1989-07-13 |
Family
ID=31489801
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19934987U Pending JPH01104035U (en]) | 1987-12-28 | 1987-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01104035U (en]) |
-
1987
- 1987-12-28 JP JP19934987U patent/JPH01104035U/ja active Pending